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Nanofabrication and Nanocharacterization Facilities at Cornell
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Micro/Nanosystems Faculty:
Harold Craighead,
David Erickson,
Ephrahim Garcia,
Brian Kirby,
Mingming Wu
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Because of the complex and expensive equipment and infrastructure required for micro- and nanoscale
research, facilities are often a limiting factor. At Cornell, we have unparalleled resources both for fabrication and
for characterization. Many of these facilities are housed in Duffield Hall, a new, >$100M building that connects
Upson Hall (the primary home of Mechanical and Aerospace Engineering) and Phillips Hall (Electrical and Computer
Engineering) and is the center of nanoscale research at Cornell.
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View of Duffield Hall from the sundial on the Engineering Quad.
(Courtesy
Cornell University) |
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In addition to specific fabrication capabilities in the Integrated
Nanosystems Laboratory and the Micro/Nanofluidics
Laboratory, both in Upson Hall, our research community draws heavily on user facilities such as the
Cornell Nanofabrication Facility (CNF). The CNF houses
state-of-the-art cleanroom, fabrication, and characterization facilities.
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Other centers, such as the Nanobiotechnology Center,
Cornell Center for Materials Research,
and
Center for Nanoscale Systems,
all have extensive user facilities that we utilize for our research. These include
cleanrooms, UV and e-beam lithography, plasma and wet etching, microscopy (e.g., SEM, TEM, STEM), and surface
characterization tools (e.g., XPS, AFM, STM).
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